Tehrani, F. S. (2013). Hot-wire chemical vapour deposition of silicon carbide thin films from pure silane and methane gases.
Chicago Style (17th ed.) CitationTehrani, Fatemeh Shariatmadar. Hot-wire Chemical Vapour Deposition of Silicon Carbide Thin Films from Pure Silane and Methane Gases. 2013.
MLA (8th ed.) CitationTehrani, Fatemeh Shariatmadar. Hot-wire Chemical Vapour Deposition of Silicon Carbide Thin Films from Pure Silane and Methane Gases. 2013.
Warning: These citations may not always be 100% accurate.