Hot-wire chemical vapour deposition of silicon carbide thin films from pure silane and methane gases /
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| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
2013.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/id/eprint/5858 |
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| LEADER | 01404cam a2200349 i 4500 | ||
|---|---|---|---|
| 001 | u1019922 | ||
| 003 | SIRSI | ||
| 005 | 201508131707 | ||
| 008 | 150813s2013 my a m 000 0 eng | ||
| 040 | |a UMM |d AUM |e rda | ||
| 090 | |a QC3 |b UMP 2015 Teh | ||
| 100 | 1 | |a Tehrani, Fatemeh Shariatmadar, |e author. | |
| 245 | 1 | 0 | |a Hot-wire chemical vapour deposition of silicon carbide thin films from pure silane and methane gases / |c Fatemeh Shariatmadar Tehrani. |
| 264 | 1 | |c 2013. | |
| 264 | 4 | |c 2013. | |
| 300 | |a xix, 195 leaves : |b illustrations ; |c 30 cm. | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a unmediated |2 rdamedia | ||
| 338 | |a volume |2 rdacarrier | ||
| 502 | |b Ph.D. |c Jabatan Fizik, Fakulti Sains, Universiti Malaya |d 2013. | ||
| 504 | |a Bibliography: leaves 179-191. | ||
| 530 | |a Issued also in CD. | ||
| 650 | 0 | |a Silicon carbide. | |
| 650 | 0 | |a Silicon carbide |x Electric properties. | |
| 650 | 0 | |a Silicon-carbide thin films. | |
| 650 | 0 | |a Chemical vapor deposition. | |
| 710 | 2 | |a Universiti Malaya. |b Jabatan Fizik, |e degree granting institution. | |
| 856 | 4 | 1 | |u http://studentsrepo.um.edu.my/id/eprint/5858 |
| 900 | |a NSR NSM | ||
| 596 | |a 1 25 | ||
| 999 | |a QC3 UMP 2015 TEH |w LC |c 1 |i A516239503 |d 28/9/2016 |f 28/9/2016 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 28/9/2016 |1 STEM | ||
| 999 | |a QC3 UMP 2015 TEH |w LC |c 1 |i A517298088 |f 27/2/2023 |g 1 |l STACKS |m P25UMARCHI |r N |s Y |t CD |u 27/2/2023 |1 STEM |o .STAFF. MST-CD1823 | ||