Hot-wire chemical vapour deposition of silicon carbide thin films from pure silane and methane gases /

Saved in:
Bibliographic Details
Main Author: Tehrani, Fatemeh Shariatmadar (Author)
Format: Thesis Book
Language:English
Published: 2013.
Subjects:
Online Access:http://studentsrepo.um.edu.my/id/eprint/5858
Tags: Add Tag
No Tags, Be the first to tag this record!
LEADER 01404cam a2200349 i 4500
001 u1019922
003 SIRSI
005 201508131707
008 150813s2013 my a m 000 0 eng
040 |a UMM  |d AUM  |e rda 
090 |a QC3  |b UMP 2015 Teh 
100 1 |a Tehrani, Fatemeh Shariatmadar,  |e author. 
245 1 0 |a Hot-wire chemical vapour deposition of silicon carbide thin films from pure silane and methane gases /  |c Fatemeh Shariatmadar Tehrani. 
264 1 |c 2013. 
264 4 |c  2013. 
300 |a xix, 195 leaves :  |b illustrations ;  |c 30 cm. 
336 |a text  |2 rdacontent 
337 |a unmediated  |2 rdamedia 
338 |a volume  |2 rdacarrier 
502 |b Ph.D.  |c Jabatan Fizik, Fakulti Sains, Universiti Malaya  |d 2013. 
504 |a Bibliography: leaves 179-191. 
530 |a Issued also in CD. 
650 0 |a Silicon carbide. 
650 0 |a Silicon carbide  |x Electric properties. 
650 0 |a Silicon-carbide thin films. 
650 0 |a Chemical vapor deposition. 
710 2 |a Universiti Malaya.  |b Jabatan Fizik,  |e degree granting institution. 
856 4 1 |u http://studentsrepo.um.edu.my/id/eprint/5858 
900 |a NSR NSM 
596 |a 1 25 
999 |a QC3 UMP 2015 TEH  |w LC  |c 1  |i A516239503  |d 28/9/2016  |f 28/9/2016  |g 1  |l STACKS  |m P01UTAMA  |r Y  |s Y  |t TESIS  |u 28/9/2016  |1 STEM 
999 |a QC3 UMP 2015 TEH  |w LC  |c 1  |i A517298088  |f 27/2/2023  |g 1  |l STACKS  |m P25UMARCHI  |r N  |s Y  |t CD  |u 27/2/2023  |1 STEM  |o .STAFF. MST-CD1823