Study of the effects of neutral gas heating in a radio frequency inductively coupled plasma /
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| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
2015.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/id/eprint/8332 |
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| LEADER | 01108cam a2200301 i 4500 | ||
|---|---|---|---|
| 001 | u1034876 | ||
| 003 | SIRSI | ||
| 005 | 201606100910 | ||
| 008 | 160610s2015 my a m 000 0 eng | ||
| 040 | |a UMM |e rda | ||
| 090 | |a QC3 |b UMP 2015 Kan | ||
| 100 | 0 | |a Kanesh Kumar Jayapalan, |e author. | |
| 245 | 1 | 0 | |a Study of the effects of neutral gas heating in a radio frequency inductively coupled plasma / |c Kanesh Kumar a/l Jayapalan. |
| 264 | 1 | |c 2015. | |
| 264 | 4 | |c 2015. | |
| 300 | |a xxvi, 226 leaves : |b illustrations ; |c 30 cm. | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a unmediated |2 rdamedia | ||
| 338 | |a volume |2 rdacarrier | ||
| 502 | |b Ph.D. |c Jabatan Fizik, Fakulti Sains, Universiti Malaya |d 2015. | ||
| 504 | |a Bibliography: leaves 175-186. | ||
| 650 | 0 | |a Plasma (Ionized gases) | |
| 650 | 0 | |a Plasma heating. | |
| 710 | 2 | |a Universiti Malaya. |b Jabatan Fizik, |e degree granting institution. | |
| 856 | 4 | 1 | |u http://studentsrepo.um.edu.my/id/eprint/8332 |
| 900 | |a NSR NSM | ||
| 596 | |a 1 | ||
| 999 | |a QC3 UMP 2015 KAN |w LC |c 1 |i A516211187 |d 2/11/2016 |f 2/11/2016 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 1/11/2016 |1 STEM | ||