Study of the effects of neutral gas heating in a radio frequency inductively coupled plasma /
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主要作者: | Kanesh Kumar Jayapalan (Author) |
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格式: | Thesis 图书 |
语言: | English |
出版: |
2015.
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主题: | |
在线阅读: | http://studentsrepo.um.edu.my/id/eprint/8332 |
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