Ilyani Putri Jamal. (2016). Deposition of silicon carbon nitride by dual magnetron sputtering: Plasma diagnostic studies and material characterization.
Chicago Style (17th ed.) CitationIlyani Putri Jamal. Deposition of Silicon Carbon Nitride by Dual Magnetron Sputtering: Plasma Diagnostic Studies and Material Characterization. 2016.
MLA引文Ilyani Putri Jamal. Deposition of Silicon Carbon Nitride by Dual Magnetron Sputtering: Plasma Diagnostic Studies and Material Characterization. 2016.
警告:這些引文格式不一定是100%准確.