Deposition of silicon carbon nitride by dual magnetron sputtering : plasma diagnostic studies and material characterization /

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Bibliographic Details
Main Author: Ilyani Putri Jamal (Author)
Format: Thesis Book
Language:English
Published: 2016.
Subjects:
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040 |a UMM  |e rda 
090 |a QC3  |b UM 2016 Ilypj 
100 0 |a Ilyani Putri Jamal,  |e author. 
245 1 0 |a Deposition of silicon carbon nitride by dual magnetron sputtering :  |b plasma diagnostic studies and material characterization /  |c Ilyani Putri Binti Jamal. 
264 1 |c 2016. 
264 4 |c  2016. 
300 |a xviii, 115 leaves :  |b illustrations ;  |c 30 cm. 
336 |a text  |2 rdacontent 
337 |a unmediated  |2 rdamedia 
338 |a volume  |2 rdacarrier 
502 |b M.Sc.  |c Jabatan Fizik, Fakulti Sains, Universiti Malaya  |d 2016. 
504 |a Bibliography: leaves 109-114. 
650 0 |a Sputtering (Physics) 
650 0 |a Materials science. 
650 0 |a Silicon nitride. 
650 0 |a Plasma diagnostics. 
710 2 |a Universiti Malaya.  |b Jabatan Fizik,  |e degree granting institution. 
900 |a NSR NSM 
596 |a 1 
999 |a QC3 UM 2016 ILYPJ  |w LC  |c 1  |i A516602656  |d 14/4/2017  |f 14/4/2017  |g 1  |l STACKS  |m P01UTAMA  |r Y  |s Y  |t TESIS  |u 5/4/2017  |1 STEM