Deposition of silicon carbon nitride by dual magnetron sputtering : plasma diagnostic studies and material characterization /

Deposition of silicon carbon nitride by dual magnetron sputtering : plasma diagnostic studies and material characterization /

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书目详细资料
主要作者:	Ilyani Putri Jamal (Author)
格式:	Thesis 图书
语言:	English
出版:	2016.
主题:	Sputtering (Physics) Materials science. Silicon nitride. Plasma diagnostics.
标签:	添加标签没有标签, 成为第一个标记此记录!

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