Deposition of silicon carbon nitride by dual magnetron sputtering : plasma diagnostic studies and material characterization /

Deposition of silicon carbon nitride by dual magnetron sputtering : plasma diagnostic studies and material characterization /

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書目詳細資料
主要作者:	Ilyani Putri Jamal (Author)
格式:	Thesis 圖書
語言:	English
出版:	2016.
主題:	Sputtering (Physics) Materials science. Silicon nitride. Plasma diagnostics.
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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