Structure and optical properties of multi-phase structured amorphous silicon carbon nitride thin films deposited by plasma enhanced chemical vapour deposition /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2018.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/8640/ |
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| Physical Description: | xix, 159 leaves : illustrations ; 30 cm. |
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| Bibliography: | Bibliography: leaves 146-155. |