Structure and optical properties of multi-phase structured amorphous silicon carbon nitride thin films deposited by plasma enhanced chemical vapour deposition /

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Bibliographic Details
Main Author: Mohd Azam Abdul Rahman (Author)
Format: Thesis Book
Language:English
Published: 2018.
Subjects:
Online Access:http://studentsrepo.um.edu.my/8640/
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Description
Physical Description:xix, 159 leaves : illustrations ; 30 cm.
Bibliography:Bibliography: leaves 146-155.