Structure and optical properties of multi-phase structured amorphous silicon carbon nitride thin films deposited by plasma enhanced chemical vapour deposition /
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
2018.
|
| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/8640/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| LEADER | 01265cam a2200301 i 4500 | ||
|---|---|---|---|
| 001 | u1083145 | ||
| 003 | SIRSI | ||
| 005 | 201805141620 | ||
| 008 | 180514s2018 my a m 000 0 eng | ||
| 040 | |a UMM | ||
| 090 | |a QC3 |b UMP 2018 Mohaar | ||
| 100 | 0 | |a Mohd Azam Abdul Rahman, |e author. | |
| 245 | 1 | 0 | |a Structure and optical properties of multi-phase structured amorphous silicon carbon nitride thin films deposited by plasma enhanced chemical vapour deposition / |c Mohd Azam bin Abdul Rahman. |
| 260 | |c 2018. | ||
| 300 | |a xix, 159 leaves : |b illustrations ; |c 30 cm. | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a unmediated |2 rdamedia | ||
| 338 | |a volume |2 rdacarrier | ||
| 502 | |b Ph.D. |c Jabatan Fizik, Fakulti Sains, Universiti Malaya |d 2018. | ||
| 504 | |a Bibliography: leaves 146-155. | ||
| 650 | 0 | |a Thin films |x Optical properties. | |
| 650 | 0 | |a Silicon-carbide thin films. | |
| 710 | 2 | |a Universiti Malaya. |b Jabatan Fizik, |e degree granting institution. | |
| 856 | 4 | 1 | |u http://studentsrepo.um.edu.my/8640/ |
| 596 | |a 1 25 | ||
| 900 | |a NSM | ||
| 999 | |a QC3 UMP 2018 MOHAAR |w LC |c 1 |i A517077679 |d 30/5/2018 |f 30/5/2018 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 30/5/2018 |1 STEM | ||
| 999 | |a QC3 UMP 2018 MOHAAR |w LC |c 1 |i A517022975 |l STACKS |m P25UMARCHI |r N |s Y |t CD |u 18/5/2018 |1 STEM | ||