Structure and optical properties of multi-phase structured amorphous silicon carbon nitride thin films deposited by plasma enhanced chemical vapour deposition /

Structure and optical properties of multi-phase structured amorphous silicon carbon nitride thin films deposited by plasma enhanced chemical vapour deposition /

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书目详细资料
主要作者:	Mohd Azam Abdul Rahman (Author)
格式:	Thesis 图书
语言:	English
出版:	2018.
主题:	Thin films > Optical properties. Silicon-carbide thin films.
在线阅读:	http://studentsrepo.um.edu.my/8640/
标签:	添加标签没有标签, 成为第一个标记此记录!

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