Structure and optical properties of multi-phase structured amorphous silicon carbon nitride thin films deposited by plasma enhanced chemical vapour deposition /

Structure and optical properties of multi-phase structured amorphous silicon carbon nitride thin films deposited by plasma enhanced chemical vapour deposition /

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書目詳細資料
主要作者:	Mohd Azam Abdul Rahman (Author)
格式:	Thesis 圖書
語言:	English
出版:	2018.
主題:	Thin films > Optical properties. Silicon-carbide thin films.
在線閱讀:	http://studentsrepo.um.edu.my/8640/
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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