Formation and characterization of rare earth oxides as high-k gate dielectrics on germanium substrate /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2022.
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| Subjects: | |
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| Physical Description: | xx, 202 leaves : illustrations ; 30 cm Also issued in CD. |
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| Bibliography: | Bbiliography: leaves 181-201. |