APA (7th ed.) Citation

Chor, E. F. (1982). A study of some aspects of electron beam lithography.

Chicago Style (17th ed.) Citation

Chor, Eng Fong. A Study of Some Aspects of Electron Beam Lithography. 1982.

MLA (8th ed.) Citation

Chor, Eng Fong. A Study of Some Aspects of Electron Beam Lithography. 1982.

Warning: These citations may not always be 100% accurate.