A study of some aspects of electron beam lithography /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1982
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| Subjects: | |
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| LEADER | 00746cam a2200229 4500 | ||
|---|---|---|---|
| 001 | u33706 | ||
| 003 | SIRSI | ||
| 008 | 840802s1982 si v 00 1 eng m | ||
| 035 | |a AAD-6307 | ||
| 040 | |a UMM | ||
| 090 | |a TK7874 |b Cho | ||
| 100 | 1 | 0 | |a Chor, Eng Fong. |
| 245 | 1 | 2 | |a A study of some aspects of electron beam lithography / |c by Chor Eng Fong. |
| 260 | |c 1982 | ||
| 300 | |a viii, 112 leaves : |b ill. ; |c 30cm. | ||
| 502 | |a Dissertation (M.Eng.) -- National University of Singapore, 1982. | ||
| 504 | |a Bibliography: leaves 93-101 | ||
| 650 | 0 | |a Lithography, Electron beam. | |
| 650 | 0 | |a Integrated circuits. | |
| 948 | |a 16/03/1991 |b 06/06/2002 | ||
| 596 | |a 1 | ||
| 999 | |a TK7874 CHO |w LC |c 1 |i A002760703 |d 8/2/1999 |l STACKS |m P01UTAMA |n 1 |r Y |s Y |t TESIS |u 19/2/1992 | ||