A spectroscopic photoemission microscopy system for semiconductor device analysis /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1994.
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| Subjects: | |
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| LEADER | 00864cam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | u368743 | ||
| 003 | SIRSI | ||
| 008 | 950308s1994 si v 00 1 eng m | ||
| 035 | |a ABV-2822 | ||
| 040 | |a UMM | ||
| 043 | |a a-si--- | ||
| 090 | |a QC715.15 |b Koh | ||
| 100 | 1 | 0 | |a Koh, Lian-Ser. |
| 245 | 1 | 2 | |a A spectroscopic photoemission microscopy system for semiconductor device analysis / |c by Koh Lian-Ser. |
| 260 | |c 1994. | ||
| 300 | |a vi, 124 leaves : |b ill. ; |c 30 cm. | ||
| 500 | |a Photocopy | ||
| 502 | |a Dissertation (M.Eng.) -- National University of Singapore, 1994. | ||
| 504 | |a Bibliography: leaves 119-124. | ||
| 650 | 0 | |a Semiconductors |x Testing |x Optical methods. | |
| 650 | 0 | |a Photoemission. | |
| 650 | 0 | |a Emission spectroscopy. | |
| 948 | |a 08/03/1995 |b 25/11/2000 | ||
| 596 | |a 1 | ||
| 999 | |a QC715.15 KOH |w LC |c 1 |i A505564812 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 22/4/1996 | ||