Preparation and characterisation of hydrogenated R.F. sputtered amorphous silicon carbide films /

Saved in:
Bibliographic Details
Main Author: Loo, Fook Leong
Format: Thesis Book
Language:English
Published: 1996.
Subjects:
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Physical Description:1 v. (various pagings) : ill. ; 30 cm.
Bibliography:Includes bibliographical references.