Preparation and characterisation of hydrogenated R.F. sputtered amorphous silicon carbide films /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1996.
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| LEADER | 00881cam a2200229 a 4500 | ||
|---|---|---|---|
| 001 | u400613 | ||
| 003 | SIRSI | ||
| 008 | 960809s1996 si v 00 1 eng m | ||
| 035 | |a ACA-8691 | ||
| 040 | |a UMM | ||
| 090 | |a TK7871.15 |b S56Loo | ||
| 100 | 1 | 0 | |a Loo, Fook Leong. |
| 245 | 1 | 0 | |a Preparation and characterisation of hydrogenated R.F. sputtered amorphous silicon carbide films / |c by Loo Fook Leong. |
| 260 | |c 1996. | ||
| 300 | |a 1 v. (various pagings) : |b ill. ; |c 30 cm. | ||
| 504 | |a Includes bibliographical references. | ||
| 502 | |a Dissertation (M.Eng.) -- National University of Singapore, 1996. | ||
| 650 | 0 | |a Silicon-carbide thin films |x Electric properties. | |
| 650 | 0 | |a Silicon-carbide thin films |x Optical properties. | |
| 948 | |a 09/08/1996 |b 22/09/1998 | ||
| 596 | |a 1 | ||
| 999 | |a TK7871.15 S56LOO |w LC |c 1 |i A506133044 |d 30/3/2008 |e 30/3/2008 |l STACKS |m P01UTAMA |n 1 |r Y |s Y |t TESIS |u 27/9/1996 | ||