Direct-current plasma glow discharged hydrogenated SiNx alloys : deposition and physical studies /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1996.
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| Subjects: | |
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| Item Description: | Microfiche. Kuala Lumpur : University of Malaya Library, 2000. 3 fiche : negative ; 11 x 15 cm. |
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| Physical Description: | v, 214 leaves : [append.] ill., 29 cm. |
| Bibliography: | Includes bibliographical references. |