Electrical and structural characterisations of rapid thermal annealed silicon-silicon oxide systems /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1997.
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| Subjects: | |
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| LEADER | 00827cam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | u417649 | ||
| 003 | SIRSI | ||
| 008 | 971111s1997 si v 00 1 eng m | ||
| 035 | |a ACE-1128 | ||
| 040 | |a UMM | ||
| 090 | |a TK7871.85 |b Cha | ||
| 100 | 1 | 0 | |a Chan, Yee Ming. |
| 245 | 1 | 0 | |a Electrical and structural characterisations of rapid thermal annealed silicon-silicon oxide systems / |c Chan Yee Ming. |
| 260 | |c 1997. | ||
| 300 | |a xvii, 171 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Thesis (Ph.D.) -- National University of Singapore, 1997. | ||
| 504 | |a Includes bibliographical references. | ||
| 650 | 0 | |a Semiconductors |x Heat treatment | |
| 650 | 0 | |a Rapid thermal processing. | |
| 650 | 0 | |a Silicon oxide. | |
| 948 | |a 11/11/1997 |b 22/09/1998 | ||
| 596 | |a 1 | ||
| 999 | |a TK7871.85 CHA |w LC |c 1 |i A506953480 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 23/7/1998 | ||