The structure and optical characteristics of plasma enhanced chemical vapour deposited silicon oxide thin films /
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
1997.
|
| Subjects: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| LEADER | 01051cam a2200277 a 4500 | ||
|---|---|---|---|
| 001 | u419054 | ||
| 003 | SIRSI | ||
| 008 | 930114s1997 my t 00 1 eng m | ||
| 035 | |a ACE-3234 | ||
| 040 | |a UMM | ||
| 090 | |a QC176.9 |b P64Tan | ||
| 091 | |a Microfiche 14429 | ||
| 100 | 1 | 0 | |a Tan, Kim Hee. |
| 245 | 1 | 4 | |a The structure and optical characteristics of plasma enhanced chemical vapour deposited silicon oxide thin films / |c Tan Kim Hee. |
| 260 | |c 1997. | ||
| 300 | |a v, 169 leaves : |b ill. ; |c 30 cm. | ||
| 500 | |a Microfiche. Kuala Lumpur : University of Malaya Library, 2000. 2 fiches : negative ; 11 x 15 cm. | ||
| 502 | |a Dissertation (M.Sc.) -- Fakulti Sains, Universiti Malaya, 1997. | ||
| 504 | |a Includes bibliographical reference. | ||
| 650 | 0 | |a Thin films |x Optical properties. | |
| 650 | 0 | |a Thin films |x Electric properties. | |
| 650 | 0 | |a Silicon oxide films. | |
| 710 | 2 | 0 | |a Universiti Malaya. |b Fakulti Sains. |
| 948 | |a 20/12/1997 |b 14/06/2002 | ||
| 596 | |a 1 | ||
| 999 | |a QC176.9 P64TAN |w LC |c 1 |i A507734545 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 28/10/1998 | ||