Studies on a planar coil inductively coupled plasma system and its applications /

Studies on a planar coil inductively coupled plasma system and its applications /

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书目详细资料
主要作者:	Kok, Yip Cheong
格式:	Thesis 图书
语言:	English
出版:	1997.
主题:	Plasma diagnostics. Plasma engineering.
标签:	添加标签没有标签, 成为第一个标记此记录!

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