Surface modification of Si, GaAs and and InP by 1-10 keV Ar+ and N2+ ion bombardment /

Surface modification of Si, GaAs and and InP by 1-10 keV Ar+ and N2+ ion bombardment /

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書目詳細資料
主要作者:	Pan, Ji Sheng
格式:	Thesis 圖書
語言:	English
出版:	1997.
主題:	Ion bombardment. Surfaces (Technology) Ion implantation.
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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