APA (7th ed.) Citation

Lee, Y. P. (1998). Laser cleaning of plasma-etch-induced polymers from via holes and other submicron structures on silicon wafers.

Chicago Style (17th ed.) Citation

Lee, Yuan Ping. Laser Cleaning of Plasma-etch-induced Polymers from via Holes and Other Submicron Structures on Silicon Wafers. 1998.

MLA (8th ed.) Citation

Lee, Yuan Ping. Laser Cleaning of Plasma-etch-induced Polymers from via Holes and Other Submicron Structures on Silicon Wafers. 1998.

Warning: These citations may not always be 100% accurate.