Lee, Y. P. (1998). Laser cleaning of plasma-etch-induced polymers from via holes and other submicron structures on silicon wafers.
Chicago Style (17th ed.) CitationLee, Yuan Ping. Laser Cleaning of Plasma-etch-induced Polymers from via Holes and Other Submicron Structures on Silicon Wafers. 1998.
MLA引文Lee, Yuan Ping. Laser Cleaning of Plasma-etch-induced Polymers from via Holes and Other Submicron Structures on Silicon Wafers. 1998.
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