Effects of annealing on the structural properties of R.F. sputtered amorphous silicon carbide films /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1998.
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| LEADER | 00869cam a2200229 a 4500 | ||
|---|---|---|---|
| 001 | u433886 | ||
| 003 | SIRSI | ||
| 008 | 990106s1998 si v 00 1 eng m | ||
| 035 | |a ACG-4225 | ||
| 040 | |a UMM | ||
| 090 | |a TK7871.15 |b S56Ong | ||
| 100 | 1 | 0 | |a Ong, Tiong Yew. |
| 245 | 1 | 0 | |a Effects of annealing on the structural properties of R.F. sputtered amorphous silicon carbide films / |c by Ong Tiong Yew. |
| 260 | |c 1998. | ||
| 300 | |a xvi, 148 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Eng.) -- National University of Singapore, 1998. | ||
| 504 | |a Bibliography: leaves 133-143. | ||
| 650 | 0 | |a Silicon-carbide thin films |x Effects of rapid thermal processing on | |
| 650 | 0 | |a Semiconductors |x Heat treatment | |
| 948 | |a 06/01/1999 |b 26/04/1999 | ||
| 596 | |a 1 | ||
| 999 | |a TK7871.15 S56ONG |w LC |c 1 |i A508374398 |d 30/3/2008 |e 30/3/2008 |l STACKS |m P01UTAMA |n 4 |r Y |s Y |t TESIS |u 4/5/1999 | ||