rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Effects of annealing on the structural properties of R.F. sputtered amorphous silicon carbide films
  name:
    name part: Ong, Tiong Yew.
    role:
      role term: creator
  type of resource: text
  genre: legal case and case notes
  origin info:
    place:
      place term: si
    date issued: 1998
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xvi, 148 leaves : ill. ; 30 cm.
  note: by Ong Tiong Yew.
  note: Dissertation (M.Eng.) -- National University of Singapore, 1998.
  note: Bibliography: leaves 133-143.
  subject:
    topic: Silicon-carbide thin films
    topic: Effects of rapid thermal processing on
  subject:
    topic: Semiconductors
    topic: Heat treatment
  record info:
    record content source: UMM
    record creation date: 990106
    record identifier: u433886