A robust automatic focusing and astigmatism correction method for the scanning electron microscope /

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Bibliographic Details
Main Author: Ong, Kok Hua
Format: Thesis Book
Language:English
Published: 1998.
Subjects:
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008 950307s1998 si v 00 1 eng m
035 |a ACG-4397 
040 |a UMM 
090 |a QH212  |b S3Ong 
100 1 0 |a Ong, Kok Hua. 
245 1 2 |a A robust automatic focusing and astigmatism correction method for the scanning electron microscope /  |c by Ong Kok Hua. 
260 |c 1998. 
300 |a xiii, 171 leaves :  |b ill. ;  |c 30 cm. 
502 |a Dissertation (M.Eng.) -- National University of Singapore, 1998. 
504 |a Bibliography: leaves 134-136. 
650 0 |a Scanning electron microscopes. 
650 0 |a Image processing  |x Digital techniques. 
650 0 |a Scanning electron microscopy  |x Techniques 
948 |a 08/01/1999  |b 14/04/1999 
596 |a 1 
999 |a QH212 S3ONG  |w LC  |c 1  |i A508374807  |l STACKS  |m P01UTAMA  |r Y  |s Y  |t TESIS  |u 22/4/1999