Electrical and structural characterisation of rapid thermal annealed RF sputtered silicon oxide films /

Electrical and structural characterisation of rapid thermal annealed RF sputtered silicon oxide films /

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書目詳細資料
主要作者:	Han, King Kwang
格式:	Thesis 圖書
語言:	English
出版:	1998.
主題:	Silicon oxide films. Silicon > Electric properties. Semiconductor films. Rapid thermal processing.
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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