The application of rapid thermal annealing to reduce leakage current of Ta2O5 /
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
1999.
|
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Physical Description: | vi, 110 leaves : ill. ; 30 cm. |
|---|---|
| Bibliography: | Bibliography: leaf 104. |