Development of in-line analytical monitoring techniques for IC device fabrication /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1999.
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| LEADER | 00718cam a2200205 a 4500 | ||
|---|---|---|---|
| 001 | u443186 | ||
| 003 | SIRSI | ||
| 008 | 990805s1999 si v 00 eng m | ||
| 035 | |a ACH-7229 | ||
| 040 | |a UMM | ||
| 090 | |a QD3 |b NUS 1999 Loo | ||
| 100 | 1 | 0 | |a Loong, Sang Yee. |
| 245 | 1 | 0 | |a Development of in-line analytical monitoring techniques for IC device fabrication / |c by Loong Sang Yee. |
| 260 | |c 1999. | ||
| 300 | |a x, 85 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Sc.) -- National University of Singapore, 1999. | ||
| 504 | |a Bibliography: leaves 81-84. | ||
| 948 | |a 09/08/1999 |b 01/11/2002 | ||
| 596 | |a 1 | ||
| 999 | |a QD3 NUS 1999 LOO |w LC |c 1 |i A509000735 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 11/11/2002 |o .PUBLIC. BKOM 4 :44483 | ||