APA (7th ed.) Citation

Chen, G. L. (1999). Preparation and characterization of reactive RF sputtered nitride thin films.

Chicago Style (17th ed.) Citation

Chen, Geok Loo. Preparation and Characterization of Reactive RF Sputtered Nitride Thin Films. 1999.

MLA (8th ed.) Citation

Chen, Geok Loo. Preparation and Characterization of Reactive RF Sputtered Nitride Thin Films. 1999.

Warning: These citations may not always be 100% accurate.