Low, C. H. (1998). Spectroscopic studies of high density plasma etching processes for IC manufacturing.
Chicago Style (17th ed.) CitationLow, Chun Hui. Spectroscopic Studies of High Density Plasma Etching Processes for IC Manufacturing. 1998.
MLA (8th ed.) CitationLow, Chun Hui. Spectroscopic Studies of High Density Plasma Etching Processes for IC Manufacturing. 1998.
Warning: These citations may not always be 100% accurate.