Synthesis and characterization of RF-PECVD carbon nitride thin films /

Synthesis and characterization of RF-PECVD carbon nitride thin films /

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書目詳細資料
主要作者:	Lim, Shuang Fang
格式:	Thesis 圖書
語言:	English
出版:	1999.
主題:	Carbon compounds. Plasma-enhanced chemical vapor deposition. Thin films.
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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