APA (7th ed.) Citation

Song, J. (1999). Plasma charge damage in submicron process.

Chicago Style (17th ed.) Citation

Song, Jun. Plasma Charge Damage in Submicron Process. 1999.

MLA (8th ed.) Citation

Song, Jun. Plasma Charge Damage in Submicron Process. 1999.

Warning: These citations may not always be 100% accurate.