A golden-block based scheme for continuous pattered wafer inspection /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2000
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| LEADER | 00689cam a2200205 a 4500 | ||
|---|---|---|---|
| 001 | u469714 | ||
| 003 | SIRSI | ||
| 008 | 000929s2000 si v 00 1 eng | ||
| 035 | |a ACM-3450 | ||
| 040 | |a UMM | ||
| 090 | |a TK7 |b NUS 2000 Xie | ||
| 100 | 1 | 0 | |a Xie, Pin. |
| 245 | 1 | 2 | |a A golden-block based scheme for continuous pattered wafer inspection / |c Xie Pin. |
| 260 | |c 2000 | ||
| 300 | |a ix, 75 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Eng.) -- National University of Singapore, 2000. | ||
| 504 | |a Bibliography: leaves 69-75. | ||
| 948 | |a 02/10/2000 |b 29/10/2002 | ||
| 596 | |a 1 | ||
| 999 | |a TK7 NUS 2000 XIE |w LC |c 1 |i A509932096 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 7/11/2002 |o .PUBLIC. BKOM 4 : 45303 | ||