Effects of hydrogen and nitrogen on the passivation of boron in a TiSi2/(100)-p+Si system /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2000
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| Physical Description: | ix, 92 leaves : ill. ; 30 cm. |
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| Bibliography: | Bibliography: leaves 78-81. |