Effects of hydrogen and nitrogen on the passivation of boron in a TiSi2/(100)-p+Si system /
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2000
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| LEADER | 00719cam a2200205 a 4500 | ||
|---|---|---|---|
| 001 | u469751 | ||
| 003 | SIRSI | ||
| 008 | 000929s2000 si v 00 1 eng m | ||
| 035 | |a ACM-3572 | ||
| 040 | |a UMM | ||
| 090 | |a TK7 |b NUS 2000 Ng | ||
| 100 | 1 | 0 | |a Ng, Chit Hwei. |
| 245 | 1 | 0 | |a Effects of hydrogen and nitrogen on the passivation of boron in a TiSi2/(100)-p+Si system / |c Ng Chit Hwei. |
| 260 | |c 2000 | ||
| 300 | |a ix, 92 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Eng.) -- National University of Singapore, 2000. | ||
| 504 | |a Bibliography: leaves 78-81. | ||
| 948 | |a 03/10/2000 |b 07/11/2002 | ||
| 596 | |a 1 | ||
| 999 | |a TK7 NUS 2000 NG |w LC |c 1 |i A509932907 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 19/11/2002 |o .PUBLIC. bkom 4 : 45509 | ||