APA (7th ed.) Citation

Chen, J. H. (1999). Study of effect of rapid thermal oxidation on silicon-silicon germanium and silicon-silicon germanium carbon syatems.

Chicago Style (17th ed.) Citation

Chen, Jer Hueih. Study of Effect of Rapid Thermal Oxidation on Silicon-silicon Germanium and Silicon-silicon Germanium Carbon Syatems. 1999.

MLA (8th ed.) Citation

Chen, Jer Hueih. Study of Effect of Rapid Thermal Oxidation on Silicon-silicon Germanium and Silicon-silicon Germanium Carbon Syatems. 1999.

Warning: These citations may not always be 100% accurate.