APA (7th ed.) Citation

Liew, W. S. (2001). Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system.

Chicago Style (17th ed.) Citation

Liew, Wai Soon. Diamondlike Carbon Thin Film Deposition Using a RF Planar Coil Inductively Coupled Plasma System. 2001.

MLA (8th ed.) Citation

Liew, Wai Soon. Diamondlike Carbon Thin Film Deposition Using a RF Planar Coil Inductively Coupled Plasma System. 2001.

Warning: These citations may not always be 100% accurate.