Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system /

相似书籍

• Deposition of diamond and diamondlike carbon films using RF plasma /
  由: Tan, Chian Hong
  出版: (2004)
• Development of a planar coil radio frequency inductively coupled plasma system for material processing /
  由: Ng, Kim Hooi
  出版: (2008)
• Studies on a planar coil inductively coupled plasma system and its applications /
  由: Kok, Yip Cheong
  出版: (1997)
• Optimization of inductively coupled plasma dry etching for planar waveguide fabrication /
  由: Lim, Weng Hong
  出版: (2010)
• Inductively coupled plasma dry etching process on planar lightwave circuit fabrication /
  由: Chuah, Khoon Seah
  出版: (2010)