Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system /
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
2001.
|
| Online Access: | http://studentsrepo.um.edu.my/id/eprint/2891 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| LEADER | 00839cam a2200229 a 4500 | ||
|---|---|---|---|
| 001 | u479779 | ||
| 003 | SIRSI | ||
| 008 | 911205s2001 my at 00 1 eng m | ||
| 035 | |a ACO-7791 | ||
| 040 | |a UMM | ||
| 090 | |a QC3 |b UM 2001 Lie | ||
| 100 | 1 | 0 | |a Liew, Wai Soon. |
| 245 | 1 | 0 | |a Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / |c Liew Wai Soon. |
| 260 | |c 2001. | ||
| 300 | |a iii, 102 leaves : |b ill. ; |c 29 cm. | ||
| 502 | |a Dissertation (M.Sc.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2001. | ||
| 504 | |a Includes bibliographical references. | ||
| 710 | 2 | 0 | |a Universiti Malaya. |b Jabatan Fizik. |
| 856 | 4 | 1 | |u http://studentsrepo.um.edu.my/id/eprint/2891 |
| 948 | |a 06/04/2001 |b 09/03/2004 | ||
| 596 | |a 1 | ||
| 999 | |a QC3 UM 2001 LIE |w LC |c 1 |i A510573310 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 9/1/2002 | ||