APA (7th ed.) Citation

He, J. (2000). On the oxidation of copper in metalization related to wafer fabrication.

Chicago Style (17th ed.) Citation

He, Jun. On the Oxidation of Copper in Metalization Related to Wafer Fabrication. 2000.

MLA (8th ed.) Citation

He, Jun. On the Oxidation of Copper in Metalization Related to Wafer Fabrication. 2000.

Warning: These citations may not always be 100% accurate.