On the oxidation of copper in metalization related to wafer fabrication /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2000.
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| LEADER | 00701cam a2200205 a 4500 | ||
|---|---|---|---|
| 001 | u489797 | ||
| 003 | SIRSI | ||
| 008 | 990921s2000 si a v 00 0 eng m | ||
| 035 | |a ACR-5126 | ||
| 040 | |a UMM | ||
| 090 | |a Q115 |b NUS 2000 He | ||
| 100 | 1 | 0 | |a He, Jun. |
| 245 | 1 | 0 | |a On the oxidation of copper in metalization related to wafer fabrication / |c He Jun. |
| 260 | |c 2000. | ||
| 300 | |a vii, 86 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Sc.) -- National University of Singapore, 2000. | ||
| 504 | |a Includes bibliographical references. | ||
| 948 | |a 05/11/2001 |b 08/11/2002 | ||
| 596 | |a 1 | ||
| 999 | |a Q115 NUS 2000 HE |w LC |c 1 |i A510540551 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 15/11/2002 |o .PUBLIC. BKOM 4 : 44113 | ||