Effects of RF power and annealing on the properties of RF sputtered amorphous silicon carbide films /

Effects of RF power and annealing on the properties of RF sputtered amorphous silicon carbide films /

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书目详细资料
主要作者:	Chong, Nyok Boon
格式:	Thesis 图书
语言:	English
出版:	2000.
标签:	添加标签没有标签, 成为第一个标记此记录!

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