Oxidation-induced stacking fault in (100) and (111) silicon wafers /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2002.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/id/eprint/2316 |
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| Physical Description: | xiii, 111 leaves : ill., (some col.) ; 30 cm. |
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| Bibliography: | Bibliography: p. 101-103. |