APA (7th ed.) Citation

Luo, J. (2000). Design of an integrated in situ temperature measurement system for the microlithography process.

Chicago Style (17th ed.) Citation

Luo, Jun. Design of an Integrated in Situ Temperature Measurement System for the Microlithography Process. 2000.

MLA (8th ed.) Citation

Luo, Jun. Design of an Integrated in Situ Temperature Measurement System for the Microlithography Process. 2000.

Warning: These citations may not always be 100% accurate.