Oxidation studies of hydrogenated amorphous silicon carbide films /

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Bibliographic Details
Main Author: Lee, Liang Pao
Format: Thesis Book
Language:English
Published: 2001.
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100 1 0 |a Lee, Liang Pao. 
245 1 0 |a Oxidation studies of hydrogenated amorphous silicon carbide films /  |c Lee Iang Pao. 
260 |c 2001. 
300 |a x, 93 leaves :  |b ill. ;  |c 30 cm. 
502 |a Dissertation (M.Eng.) -- National University of Singapore, 2001. 
504 |a Includes bibliographical references. 
948 |a 21/08/2002  |b 08/11/2002 
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