Characterisation of Ta2O5 thin films for sub-0.25um applications /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2000.
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| LEADER | 00712cam a2200205 a 4500 | ||
|---|---|---|---|
| 001 | u503486 | ||
| 003 | SIRSI | ||
| 008 | 000929s2000 si v 00 1 eng m | ||
| 035 | |a ACV-5247 | ||
| 040 | |a UMM | ||
| 090 | |a TP7 |b NUS 2000 Tay | ||
| 100 | 1 | 0 | |a Tay, Mark Gek Leng. |
| 245 | 1 | 0 | |a Characterisation of Ta2O5 thin films for sub-0.25um applications / |c Tay Gek Leng, Mark. |
| 260 | |c 2000. | ||
| 300 | |a xix, 190 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Eng.) -- National University of Singapore, 2001. | ||
| 504 | |a Bibliography: leaves 188-190. | ||
| 948 | |a 23/08/2002 |b 08/11/2002 | ||
| 596 | |a 1 | ||
| 999 | |a TP7 NUS 2000 TAY |w LC |c 1 |i A510775129 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 19/11/2002 |o .PUBLIC. bkom 4 : 43185 | ||