APA (7th ed.) Citation

Xu, X. (2002). Inductively coupled plasma etching of silicon.

Chicago Style (17th ed.) Citation

Xu, Xinhai. Inductively Coupled Plasma Etching of Silicon. 2002.

MLA (8th ed.) Citation

Xu, Xinhai. Inductively Coupled Plasma Etching of Silicon. 2002.

Warning: These citations may not always be 100% accurate.