Xu, X. (2002). Inductively coupled plasma etching of silicon.
Chicago Style (17th ed.) CitationXu, Xinhai. Inductively Coupled Plasma Etching of Silicon. 2002.
MLA引文Xu, Xinhai. Inductively Coupled Plasma Etching of Silicon. 2002.
警告:這些引文格式不一定是100%准確.